The Otaniemi Research Infrastrcture for Micro- and Nanotechnologies offers a wide variety of production processes and equipment for micro- and nanostructures.
The RI facilities include a cleanroom of 2 600 m2 area with versatile facilities including state of the art nanolithography and processing equipment, laboratories with built-in cleanrooms for micropackaging and back-end processes, well-equipped and controlled labs for thin film, MOVPE and MBE processes, and a separate semi-clean room of 150 m2 area.
The RI hosts high-resolution electron microscopy, scanning probe microscopy and X-ray scattering instruments for soft, hard and biomaterial sample imaging and characterization.
For experiments of quantum engineering, nanoelectronics and nanomechanical systems, the RI host world-class facilities including nine dilution refrigerators for sub 1 K research, two nuclear demagnetization cryostats for sub mK research, 5 shielded rooms and 6 vibration isolation platforms.
The facilities are located in two buildings on the Otaniemi Campus area: Micronova and Nano-talo.